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IPM Series vacuum pump

Features:

Environmental friendly new vacuum pump
Small size, low energy consumption, great cost reduction
Energy saving pump suitable for medium severe process

 

Application

Load Lock、Etch、Transfer、Ashing、Metrology、Litho、PVD、Implant


Model Specifications
Catalogue & Technical Manual


Technical Parameter

Hanbell IPM

100

600

DP size

m3/h

100

100

BP size

m3/h

/

600

Peak speed

m3/h

100

600

Untimate Vac

mTorr

7.5

3.75

System power at Ult.

kw

0.7

1

Dimension-L

mm

720

720

Dimension-W

mm

340

340

Dimension-H

mm

465

700

Noise

dB(A)

65

65

Weight

KG

145

200

Inlet connection

ISO

63

80

Oulter connection

NW

25

25


Catalogue & Technical Manual

Drawing

Name

Release Time

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