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IPH series vacuum pump

Features

The iPH series screw pump provides great capability for wide application especially in harsh process. The excellent pump performance comes from shortest gas path of rotors and brilliant rotor profile sealing design.

Designed by HANBELL and made in Taiwan or Shanghai

25% power saving than previous version and Green mode equipped

Thermal control solution to avoid cold spot inside of pump

Optimized pimp size, easy for plug and play

 

Applications:

Etch、Implant、HDP-CVD、SACVD、MOCVD、PECVD、LPCVD、ALD


Model Specifications
Catalogue & Technical Manual

Technical Data

Product

Unit

iPH100

Iph200

iPH610

iPH1210

Iph1210h

iPH1220

iPH1810

iPH1820

Dry pump

m3/h

120

200

120

120

120

200

120

200

Booster

m3/h

/

/

600

1200

1200

1200

1800

1800

Max. Pumping Speed

m3/h

120

200

700

1100

1100

1250

1800

1850

Ultimate Pressure

Torr

7.5x10-3

7.5x10-3

7.5x10-4

7.5x10-4

7.5x10-4

7.5x10-4

7.5x10-4

7.5x10-4

System Power at Ult.

Kw

2.1

3.5

2.6

3

3.2

4.5

3.9

4.7

Inlet

ISO

63

63

100

100

100

100

160

160

Outlet

NW

40

40

40

40

40

40

40

40

Dimension(mm)

L

830

830

830

830

830

830

830

830

W

400

400

400

400

400

400

400

400

H

526

526

780

780

780

780

830

830

Weight

Kg

280

300

450

455

460

470

515

530


Catalogue & Technical Manual

Drawing

Name

Release Time

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